Triaxial membrane accelerometer

Details Triaxial membrane accelerometer Triaxial membrane accelerometer

2007-03-14

2009-10-13

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S510000, C073S514380

Reexamination Certificate

active

07600428

ABSTRACT:
The invention relates to accelerometer structures micro-machined according to micro-electronics technologies. The accelerometer according to the invention comprises a substrate, an elastically deformable thin-layer membrane suspended above the substrate and secured to the substrate at its periphery, a proof mass suspended above the membrane and linked to the latter by a central stud, and capacitive interdigitated combs distributed about the mass, having movable plates secured to the mass and fixed plates secured to the substrate. The fixed plates and movable plates of the various combs are of differentiated heights to help in the discrimination of the upward and downward vertical accelerations.

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