Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2005-12-28
2009-06-02
Chapman, John E (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
C073S493000
Reexamination Certificate
active
07540193
ABSTRACT:
A triaxial acceleration sensor module100includes: a hollow housing30provided with a partition plate31having a through-hole32; a triaxial acceleration sensor1provided inside the housing30; and a sensor driving IC40for driving the triaxial acceleration sensor1. The triaxial acceleration sensor1includes: a frame23; a weight member22provided inside the frame23; a weight member supporting portion15for supporting the weight member22in a freely suspended manner; and a plurality of flexible beams each having piezo resistance elements13thereon. In the triaxial acceleration sensor module100, the through-hole32has a size through which the triaxial acceleration sensor1can pass. Further, the triaxial acceleration sensor1is directly bonded to the sensor driving IC40via the through-hole32, and the sensor driving IC40is bonded to the partition plate31of the housing30.
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Sato Masahiro
Sugano Takayuki
Chapman John E
Marger & Johnson & McCollom, P.C.
Mitsumi Electric Co. Ltd.
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