Triangulating design data and encoding design intent for...

Details Triangulating design data and encoding design intent for... Triangulating design data and encoding design intent for...

2011-04-19

2011-04-19

Dinh, Paul (Department: 2825)

Computer-aided design and analysis of circuits and semiconductor

Design of semiconductor mask or reticle

C716S051000, C716S054000, C716S055000

Reexamination Certificate

active

07930653

ABSTRACT:
The present disclosure relates to fracturing of polygon data, with one application being microlithography. In particular, it relates to preserving data regarding edges and/or vertices of the original polygons as the polygons are triangulated and even if the results of triangulation are further fractured.

REFERENCES:
patent: 5379225 (1995-01-01), Tazawa et al.
patent: 6271852 (2001-08-01), Kamiyama et al.
patent: 6889176 (2005-05-01), Buttolo et al.
patent: 7055127 (2006-05-01), Pierrat et al.
patent: 2003/0124463 (2003-07-01), Sekigawa et al.
patent: 2004/0205686 (2004-10-01), Luttrell
patent: 2005/0091631 (2005-04-01), Gallatin et al.
patent: 2005/0216877 (2005-09-01), Pack et al.
patent: 2006/0033745 (2006-02-01), Koselj et al.
O'Rourke, Joseph. Computational Geometry in C, Second Ed. Cambridge University Press, 1998, pp. 1-62.
Alain Fournier & Delfin Y. Montuno, “Triangulating Simple Polygons and Equivalent Problems” ACM Transactions on Graphics, vol. 3 No. 2 (Apr. 1984) 153-174.
Hiroomi Nakao & Koichi Moriizumi, “A Figure-Fracturing Algorithm for Generating High-Quality Electron-Beam Exposure Data” Mitsubish Electric Advance, vol. 75 (Jun. 1996) 38-39.
International Search Report for Intl. Application No. PCT/EP2008/054649 mailed Sep. 19, 2008.
Toussaint, Godfried. “Efficient triangulation of simple poligons”, The Visual Computer, 1991, pp. 280-295.

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