Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
Reexamination Certificate
2004-12-17
2010-02-16
Raymond, Edward (Department: 2857)
Data processing: measuring, calibrating, or testing
Measurement system
Performance or efficiency evaluation
C702S034000, C702S189000, C073S865900, C340S500000, C340S679000, C377S016000, C377S027000
Reexamination Certificate
active
07664618
ABSTRACT:
The present invention such as active diagnostic algorithms is developed not only to realize the early detection of degraded vacuum pumps for the protection of pump failure but also to provide their predictive maintenance. According to the present invention, it is possible to find simple and effective ways to deal with technical problems arising from the large variability of the pump-by-pump operation characteristics and the multiple process conditions where pumps run under the idle operation and gas-loaded operation conditions alternately, especially in semiconductor manufacturing process.
REFERENCES:
patent: 6917839 (2005-07-01), Bickford
patent: 6937963 (2005-08-01), Ishii et al.
patent: 7027953 (2006-04-01), Klein
patent: 7277822 (2007-10-01), Blemel
Cheung Wan Sup
Chung Kwang Hwa
Lee Soo Gab
Lim Jong Yeon
Desta Elias
Korea Research Institute of Standards and Science
Raymond Edward
Steptoe & Johnson LLP
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