Trench separator for self-defining discontinuous film

Details Trench separator for self-defining discontinuous film Trench separator for self-defining discontinuous film

1999-05-26

2000-11-21

Smith, Matthew

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

438253, H01L 2120

Patent

active

061502308

ABSTRACT:
A discontinuous film structure on a substrate, with an etch stop layer on the substrate, a separator layer with an opening formed therein on the etch stop layer and a discontinuous-as-deposited film on the separator layer, the discontinuity substantially in register with the opening. The structure is made into a stacked capacitor with the discontinuous film being the bottom electrode, by forming a continuous dielectric layer on the bottom electrode and a continuous top electrode layer on the dielectric layer.

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