Trench pillar for wafer processing

Details Trench pillar for wafer processing Trench pillar for wafer processing

1990-06-21

1992-03-10

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

357 49, 357 55, H01L 2176

Patent

active

050949730

ABSTRACT:
A T-shaped trench intersection shaped to make uniform the wall-to-wall spacing at the trench intersection and prevent the formation of voids when the trench is filled with a conformal insulating material.

REFERENCES:
patent: 4693781 (1987-09-01), Leung

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