Trench MOSFETS with ESD Zener diode

Active solid-state devices (e.g. – transistors – solid-state diode – Regenerative type switching device – Device protection

Reexamination Certificate

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Details

C257S328000, C257S333000, C257S551000, C257SE29262, C257SE29335, C438S140000

Reexamination Certificate

active

08004009

ABSTRACT:
A semiconductor power device with Zener diode for providing an electrostatic discharge (ESD) protection and a thick insulation layer to insulate the Zener diode from a doped body region. The semiconductor power device further includes a Nitride layer underneath the thick oxide layer working as a stopper layer for protecting the thin oxide layer and the body region underneath whereby the over-etch damage and punch-through issues in process steps are eliminated.

REFERENCES:
patent: 2007/0176239 (2007-08-01), Hshieh
patent: 2009/0140333 (2009-06-01), Pan et al.

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