Trench isolation with planar topography and method of fabricatio

Details Trench isolation with planar topography and method of fabricatio Trench isolation with planar topography and method of fabricatio

1993-06-29

1994-10-25

Thomas, Tom

Fishing, trapping, and vermin destroying

437 62, 437 63, 437 64, 148DIG50, H01L 2176

Patent

active

053588916

ABSTRACT:
A method of forming and refilling a trench in a substrate. First a trench is formed in the substrate. The trench is then refilled with a conformal material. Next, a recess is etched into the top portion of the refilled trench. The recess is then refilled with a second material until the refilled recess and substrate are substantially planar.

REFERENCES:
patent: 4213818 (1980-07-01), Lemons et al.
patent: 4631803 (1986-12-01), Hunter et al.
patent: 4662977 (1987-05-01), Motley et al.
patent: 4666556 (1987-05-01), Fulton et al.
patent: 4853344 (1989-08-01), Darmawan
patent: 4876214 (1989-10-01), Yamaguchi et al.
patent: 4965217 (1990-10-01), Desilets et al.
patent: 5118384 (1992-06-01), Harmon et al.

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