Trench isolation type semiconductor device which prevents a...

Details Trench isolation type semiconductor device which prevents a... Trench isolation type semiconductor device which prevents a...

2008-04-15

2008-04-15

Le, Dung A. (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including dielectric isolation means

C257S506000, C257S507000, C257SE21549, C438S427000, C438S425000, C438S424000, C438S443000

Reexamination Certificate

active

11301510

ABSTRACT:
A trench isolation type semiconductor device in which a recess is prevented from being formed in a field region and a method of fabricating the same are provided. The trench isolation type semiconductor device includes a semiconductor substrate defined by an active region and a field region, a trench formed in the field region, an oxide layer conformally formed along the inside of the trench, a liner layer conformally formed along the oxide layer, a field insulating layer formed inside the trench including the oxide layer and the liner layer, and a field protection layer formed on the field insulating layer so that a step difference does not occur on the semiconductor substrate.

REFERENCES:
patent: 6297126 (2001-10-01), Lim et al.
patent: 2001/0015046 (2001-08-01), Hong
patent: 10-0353832 (2002-09-01), None
patent: 10-2004-0004990 (2004-01-01), None
patent: 10-2004-0032531 (2004-04-01), None

Affiliated with

Also associated with

Rating

Trench isolation type semiconductor device which prevents a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Trench isolation type semiconductor device which prevents a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Trench isolation type semiconductor device which prevents a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3956296