Trench isolation structures for a semiconductor device

Details Trench isolation structures for a semiconductor device Trench isolation structures for a semiconductor device

1995-06-07

1998-05-19

Dang, Trung

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including dielectric isolation means

257513, 438221, 438296, 438424, 438427, H01L 2900

Patent

active

057539618

ABSTRACT:
A semiconductor device includes a body of semiconductor material having first trenches and second trenches. Each of the first trenches has vertical sidewalls and each of the second trenches has tapered sidewalls. First transistors are arranged in said semiconductor body and are isolated from each other by the first trenches. Second trenches are arranged in the semiconductor body and are isolated from each other by the second trenches.

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