Trench isolation stress relief

Details Trench isolation stress relief Trench isolation stress relief

1995-06-05

1997-11-04

Loke, Steven H.

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Including dielectric isolation means

257513, 257520, H01L 2900

Patent

active

056830750

ABSTRACT:
In a microelectronic device formed on a substrate 12, a pair of trenches 30, 36 connected at their intersection by trench 54 which is disposed at an obtuse angle with respect to each of the pair of trenches 30 and 36.

REFERENCES:
patent: 3354360 (1967-11-01), Campagna et al.
patent: 4309716 (1982-01-01), El-Kareh
patent: 5094973 (1992-03-01), Pang
patent: 5126817 (1992-06-01), Baba et al.
patent: 5217919 (1993-06-01), Gaul et al.
patent: 5448102 (1995-09-01), Gaul et al.
Translation of Japan Kokai Publication No. 04-263-54 to Mitani, et al., Sep. 1992 (9 pages).

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