Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate
2007-11-13
2007-11-13
Pert, Evan (Department: 2826)
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Including dielectric isolation means
C257SE29020, C257SE21533, C216S019000
Reexamination Certificate
active
10485984
ABSTRACT:
The invention relates to a trench isolation with a self-aligning surface sealing and a fabrication method for said surface sealing. In this case, the surface sealing may have an overlap region of the substrate surface or a receded region into which extends an electrically conductive layer formed on the substrate surface.
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German Examination report dated May 31, 2005.
Temmler Dietmar
Wich-Glasen Andreas
Infineon - Technologies AG
Patterson & Sheridan L.L.P.
Pert Evan
Sandvik Benjamin P.
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