Trench-embedded mirror structure for double substrate...

Details Trench-embedded mirror structure for double substrate... Trench-embedded mirror structure for double substrate...

2005-09-20

2005-09-20

Thompson, Tim (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S291000, C359S221200, C438S052000

Reexamination Certificate

active

06947196

ABSTRACT:
A double substrate spatial light modulator with an enlarged tilt angle is achieved. The device comprises a mirror attached on one end to a hinge wherein the hinge is attached to support posts adjacent to the mirror and attached to an underlying glass substrate, a trench within the glass substrate adjacent to the support posts wherein the mirror tilts upward from the glass substrate and downward into the trench, and an overlying glass substrate. The trench provides an enlarged tilt angle of mirror motion. This improves optical performance of the mirror projector including contrast ratio and gray scale.

REFERENCES:
patent: 6046840 (2000-04-01), Huibers
patent: 6337760 (2002-01-01), Huibers et al.
patent: 6356378 (2002-03-01), Huibers
patent: 6396619 (2002-05-01), Huibers et al.
patent: 6747786 (2004-06-01), Murakami et al.
patent: 6760143 (2004-07-01), Yoon
patent: 6804039 (2004-10-01), Doan et al.

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