Treatment system including vacuum isolated sources and method

Coating processes – Vacuum utilized prior to or during coating

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

427251, 427569, 427562, 427576, 4272481, 4272555, 118718, 118719, 118723VE, 118723ME, 118729, 118733, 118500, 2041921, 20429824, 20429825, 20429826, H05H 124, C23C 1600, C23C 1400, B05C 1300

Patent

active

057730881

ABSTRACT:
Treatment systems and associated methods for exposing one or more articles to at least one treatment source are disclosed herein. In one embodiment the system includes a single treatment source. The treatment source and the article or articles being treated are positioned in separately evacuable chambers. In a method of using the first embodiment, the article or articles can be removed from a handling chamber while the treatment source remains in an evacuated environment within a source chamber. Multi-source treatment systems and associated methods are also disclosed herein. Each treatment source in the multi-source systems is positioned in a respective evacuable chamber completely isolated from the other sources which make up the overall system. An evacuable multi-source handling chamber is arranged for selective movement between the source chambers. The multi-source handling chamber is moved from source to source to accomplish exposure of one or more articles to each source while both the article and the sources remain in an evacuated environment.

REFERENCES:
patent: 3114652 (1963-12-01), Schetky
patent: 3572286 (1971-03-01), Forney
patent: 3915117 (1975-10-01), Schertler
patent: 4301765 (1981-11-01), Behn et al.
patent: 4508049 (1985-04-01), Behn et al.
patent: 4582720 (1986-04-01), Yamazaki
patent: 4592306 (1986-06-01), Gallego
patent: 4593644 (1986-06-01), Hanak
patent: 4664062 (1987-05-01), Kamohara et al.
patent: 4666734 (1987-05-01), Kamiya et al.
patent: 4692233 (1987-09-01), Casey
patent: 4763601 (1988-08-01), Saida et al.
patent: 4946576 (1990-08-01), Dietrich et al.
patent: 5076205 (1991-12-01), Vowles et al.
patent: 5310410 (1994-05-01), Begin et al.
patent: 5472506 (1995-12-01), Tohma et al.
patent: 5512320 (1996-04-01), Turner et al.
Websters 9th New Collegiate Dictionary, Merriam-Webster, Inc., 1990 (No Month), Excerpts p. 212.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Treatment system including vacuum isolated sources and method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Treatment system including vacuum isolated sources and method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Treatment system including vacuum isolated sources and method will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-1856620

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.