Valves and valve actuation – With means to increase head and seat contact pressure – Gate valve
Patent
1991-07-17
1992-09-29
Fox, John C.
Valves and valve actuation
With means to increase head and seat contact pressure
Gate valve
251368, F16K 2500
Patent
active
051508826
ABSTRACT:
A toggled gate device to be used for opening and closing a gate aperture leading to a magnetron plasma etching apparatus comprises a gate for being pressed against the wall defining the gate aperture to hermetically cover the gate aperture. The gate is supported by a support member such that the gate is movable in substantially the horizontal direction toward and away from the gate aperture. The support member is vertically driven by a cylinder. Stopper plates are arranged at an upper portion of the gate and provided with a surface inclined divergently from the edge remote from the gate aperture toward the edge close to the gate aperture. Rollers are arranged on the wall to abut the respective stopper plates. The stopper plates and the rollers are made of an iron or nickel-based double boride hard alloy. Part of the force applied to the rollers by the gate through the respective stopper plates is converted into a force moving and urging the gate toward the wall.
REFERENCES:
patent: 4640223 (1987-02-01), Dozier
patent: 5002255 (1991-03-01), Sawa et al.
G. Niemann `Maschinenelemente Band I`, 1981, Springer-Verlag, Berlin Heidelberg, New York, pp. 257-278.
Fox John C.
Tokyo Electron Limited
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