Treatment of wastes from high purity silicon process

Details Treatment of wastes from high purity silicon process Treatment of wastes from high purity silicon process

1986-03-26

1988-05-10

Bashore, S. Leon

Distillation: processes, separatory

Plural distillations performed on same material

Distillation of initial distillate

159 473, 423341, 423342, B01D 300

Patent

active

047433442

ABSTRACT:
Method for treating waste slurries containing solid impurities, e.g. in the form of metal chlorides, and silicon tetrachloride and trichlorosilane by evaporation and separation techniques to recover more of the silicon tetrachloride and trichlorosilane.

REFERENCES:
patent: 3878291 (1975-04-01), Keller et al.
patent: 4092446 (1978-05-01), Padovani et al.
patent: 4130632 (1978-12-01), Braunsperger et al.
patent: 4340574 (1982-07-01), Coleman

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