Treatment of NH.sub.3 -containing gases

Details Treatment of NH.sub.3 -containing gases Treatment of NH.sub.3 -containing gases

1996-12-23

1999-03-09

Lewis, Michael

Chemistry of inorganic compounds

Modifying or removing component of normally gaseous mixture

Nitrogen or nitrogenous component

423240S, B01D 5354

Patent

active

058796460

ABSTRACT:
A waste gas stream containing toxic NF.sub.3 and optionally other gases, such as acidic fluoride gases, for example, HF, SiF.sub.4, MoF.sub.6 and WF.sub.6 is first treated with particles or ribbons of a Cr-containing Fe alloy at about 300.degree.-600.degree. C. to remove the NF.sub.3 content and, if desired, subsequently with an alkaline neutralizing agent in the form of pellets to remove the acidic fluoride contents, if any; said alloy containing preferably about 16-26% Cr and being used in a form of bed packed with said ribbons.

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