Treatment of NF.sub.3 -containing gases

Details Treatment of NF.sub.3 -containing gases Treatment of NF.sub.3 -containing gases

1998-03-09

1999-05-25

Tran, Hien

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Waste gas purifier

422171, 422170, 502316, B01D 5334

Patent

active

059067977

ABSTRACT:
A waste gas stream containing toxic NF.sub.3 and optionally other gases, such as acidic fluoride gases, for example, HF, SiF.sub.4, MoF.sub.6 and WF.sub.6 is first treated with particles or ribbons of a Cr-containing Fe alloy at about 300-600.degree. C. to remove the NF.sub.3 content and, if desired, subsequently with an alkaline neutralizing agent in the form of pellets to remove the acidic fluoride contents, if any; said alloy containing preferably about 16-26% Cr and being used in a form of bed packed with said ribbons

REFERENCES:
patent: 4193976 (1980-03-01), Lileck et al.
patent: 4784984 (1988-11-01), Yamanaka et al.
patent: 4948571 (1990-08-01), Harada et al.
patent: 4964137 (1990-10-01), Aramaki et al.
patent: 5165899 (1992-11-01), Delaunay et al.
patent: 5176889 (1993-01-01), Yoshino et al.
patent: 5183647 (1993-02-01), Harada et al.
patent: 5417948 (1995-05-01), Iwata
patent: 5728642 (1998-03-01), Aritsuka et al.

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