Treatment method in glow-discharge plasma and apparatus thereof

Details Treatment method in glow-discharge plasma and apparatus thereof Treatment method in glow-discharge plasma and apparatus thereof

1997-05-22

1999-10-19

Paschall, Mark

Electric heating

Metal heating

By arc

21912143, 21912154, 118723R, 20419212, B23K 1000

Patent

active

059683775

ABSTRACT:
In a glow-discharge plasma treatment, a substrate is disposed between two opposing electrodes, at least one electrode being covered by a solid dielectric at an opposing surface. An electric field is imposed between the electrodes in an atmospheric pressure. The electric field is pulse modulated such that an onset time, prefeably an offset time as well, of a pulse is less than 100 .mu.s, and field intensity is 1 to 100 kV/cm. Thus, a stable and evenly dispersed discharge-plasma is obtained, which can treat an outer to surface of the substrate.

REFERENCES:
patent: 5286360 (1994-02-01), Szczyrbowski et al.
patent: 5539303 (1996-07-01), Okazako et al.
patent: 5607509 (1997-03-01), Schumacher et al.
patent: 5654043 (1997-08-01), Shao et al.
patent: 5770023 (1998-06-01), Sellers
patent: 5792517 (1998-08-01), Takeuchi et al.

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