Treatment apparatus

Details Treatment apparatus Treatment apparatus

1995-08-21

1998-03-17

Nguyen, Nam

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429806, 20429808, 20429814, 20429819, 20419212, C23C 1434

Patent

active

057282765

ABSTRACT:
In a treatment apparatus, a collimator is insulated electrically from the other equipment to be rendered electrically floating, and also the potential of the collimator is variably controllable by a variable DC power source. Therefore, the thickness in plane of the layer to be produced can be uniformalized by controlling the voltage applied to the collimator, without changing both layout and figure of the hardware, e.g., permanent magnet, without process, and further without both beginning and end of a target.

REFERENCES:
patent: 3669860 (1972-06-01), Knowles et al.
patent: 4006073 (1977-02-01), Welch
patent: 4824544 (1989-04-01), Mikalesen et al.
patent: 4963239 (1990-10-01), Shimamura et al.
patent: 5114556 (1992-05-01), Lamont, Jr.
patent: 5133849 (1992-07-01), Kinoshita
patent: 5403459 (1995-04-01), Guo

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