Treatment and observation apparatus using scanning probe

Details Treatment and observation apparatus using scanning probe Treatment and observation apparatus using scanning probe

1994-04-05

1996-07-02

Berman, Jack I.

Radiant energy

Means to align or position an object relative to a source or...

25049221, 250306, 250307, 250309, G01N 23225, H01J 37252

Patent

active

055324940

ABSTRACT:
A treatment and observation apparatus using a scanning probe observes a desired area of a sample, forms a first image, magnifies a part of the area to be observed of the sample to observe it, forms a second image, and relates addresses of pixels constituting the first image and addresses of pixels constituting the second image to absolute addresses on the sample. The pixels constituting the images correspond to the addresses on the sample, respectively, and accordingly the second image can be used to designate the area to be treated with the resolution of the second image. In another embodiment, a desired area of the sample is observed with the maximum magnification and its image data are stored. The image data are compressed and displayed on a display screen of the observed area. The stored image data are read out freely with reference to the display picture to form a display picture for designating the area to be treated.

REFERENCES:
patent: 4071759 (1978-01-01), Namae
patent: 4683378 (1987-07-01), Shimase et al.
Solid State Technology, May 1987, pp. 77-78.

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