Treating substrates by producing and controlling a cryogenic aer

Details Treating substrates by producing and controlling a cryogenic aer Treating substrates by producing and controlling a cryogenic aer

1997-06-11

1999-10-05

Warden, Jill

Cleaning and liquid contact with solids

Processes

Using solid work treating agents

134 2, 134 6, 134 21, 134 36, 134902, 451 38, 451 39, 451 75, 451102, B08B 302

Patent

active

059617322

ABSTRACT:
A substrate may be treated by impinging the substrate with a cryogenic aerosol spray wherein the cryogenic aerosol spray is formed by expanding a pressurized liquid or liquid/gaseous stream of one or more cryogens through a nozzle at a given distance from the substrate into a process chamber with a pressure of about 1.6.times.10.sup.4 Pascal or less so as to form at least substantially solid aerosol particles of said one or more cryogens downstream from the nozzle by the cooling resulting from the expansion and/or evaporation to form an at least substantially solid particle containing aerosol.

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