Treating solution supplying method and apparatus

Details Treating solution supplying method and apparatus Treating solution supplying method and apparatus

1998-01-26

1999-11-16

Bareford, Katherine A.

Coating processes

Measuring, testing, or indicating

427240, 118696, 118697, 118712, 118 52, 118320, B05D 312, B05C 1102

Patent

active

059853573

ABSTRACT:
A method of supplying a treating solution based on a prestored processing program with a plurality of instructions including a supply start instruction and a supply stop instruction for performing a series of processes. The method includes the steps of executing the supply start instruction to supply the treating solution to a central region of a substrate, executing the supply stop instruction to stop supplying the treating solution when the treating solution has been supplied in a fixed quantity/and executing subsequent instructions in the processing program in response to an actual stoppage in delivering the treating solution following execution of the supply stop instruction.

REFERENCES:
patent: 4451507 (1984-05-01), Beltz et al.
patent: 5500243 (1996-03-01), Yang
patent: 5843527 (1998-12-01), Sanada

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