Coating apparatus – Projection or spray type – With projector heating – cleaning or conditioning
Reexamination Certificate
2007-09-11
2007-09-11
Tadesse, Yewebdar (Department: 1734)
Coating apparatus
Projection or spray type
With projector heating, cleaning or conditioning
C118S666000, C118S667000, C118S323000
Reexamination Certificate
active
10836146
ABSTRACT:
A resin block has a treating solution channel extending between and opening at front and back surfaces thereof. Heat conductive members are face-bonded to the front and back surfaces of the resin block, respectively, for closing the channel. Consequently, no air is present between the resin block and heat conduction members, thereby improving the efficiency of heat exchange. A nozzle of simple construction is realized only by face-bonding the two heat conductive members to the open front and rear surfaces of the resin block. Temperature control plates hold the heat conductive members along with the resin block to effect a temperature control, whereby the temperature of a treating solution in the treating solution channel is controlled effectively through the heat conductive members. The treating solution adjusted to a desired temperature is delivered from a discharge opening to a substrate for performing substrate treatment with high accuracy.
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Goto Shigehiro
Kobayashi Hiroshi
Dainippon Screen Mfg. Co,. Ltd.
Tadesse Yewebdar
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