Treating liquid replacing method, substrate treating method and

Details Treating liquid replacing method, substrate treating method and Treating liquid replacing method, substrate treating method and

1996-03-26

1998-10-27

Smith, Lynette F.

Cleaning and liquid contact with solids

Processes

For metallic, siliceous, or calcareous basework, including...

134 11, 134 952, 134 254, 1341021, C03C 2300, B08B 500, B08B 300, B08B 920

Patent

active

058266011

ABSTRACT:
A treating liquid first in a treating bath is replaced with a second treating liquid by supplying the second treating liquid to an upper position of the treating bath while discharging the first treating liquid from a lower position of the treating bath. The replacement is effected with a balance maintained between a quantity of the first treating liquid discharged and a quantity of the second treating liquid supplied. With this method, the first treating liquid in the treating bath is replaceable with a reduced quantity of the second treating liquid. This treating liquid replacing method allows a substrate to be treated efficiently with a plurality of treating liquids in one treating bath.

REFERENCES:
patent: 3848187 (1974-11-01), Rohrback et al.
patent: 5520744 (1996-05-01), Fujikawa et al.

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