Travelling-wave guide electro-optic modulator

Optical waveguides – Temporal optical modulation within an optical waveguide – Electro-optic

Reexamination Certificate

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C385S040000

Reexamination Certificate

active

07130493

ABSTRACT:
A Mach-Zehnder type electro-optic modulator based, for example, on GaAs/GaAlAs of InP/InGaAsP comprises coplanar stripline (CPS) electrodes, and optical waveguides, disposed on a conducting substrate or a conducting epitaxial layer, wherein the regions underlying the CPS electrodes are selectively rendered insulating by ion implantation to electrically isolate the CPS electrodes.

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Walker, “High Speed III-V Semiconductor, Intensity Modulators”,IEEE Journal of Quantum Electronics, vol. 27, pp. 654-667 (1991).
Bourke et al., “Fabrication of low loss GaAs/AlGaAs Mach Zehnder modulators using proton isolation”,Proceedings of the SPIE, vol. 3290, pp. 221-226 (1998).

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