Gas separation: processes – Solid sorption – Inorganic gas or liquid particle sorbed
Patent
1997-12-15
2000-04-18
Spitzer, Robert H.
Gas separation: processes
Solid sorption
Inorganic gas or liquid particle sorbed
95281, 95290, 96230, B01D 800
Patent
active
060510536
ABSTRACT:
A trapping device that performs a regeneration operation efficiently so as to raise the overall operational reliability by improving the service life as well as to lower the capital and operation cost of the processing system. The trapping device includes an exhaust path for evacuating a spent gas from a hermetic chamber through a vacuum pump; a trap section for trapping component substances from the spent gas flowing through the exhaust path; a cleaning path disposed adjacent to the exhaust path for flowing a cleaning solution for cleaning the trap section; and driving device for transposing the trap section to communicate either with the exhaust path or with the cleaning path.
REFERENCES:
patent: 1842263 (1932-01-01), Gobert
patent: 3683589 (1972-08-01), Seitz et al.
patent: 3719052 (1973-03-01), White
patent: 4551197 (1985-11-01), Guilmette et al.
Patent Abstracts of Japan, vol. 007, No. 211 (M-243), Sep. 17, 1983 & JP 58 106186 A (Hitachi Seisakusho KK), Jun. 24, 1983.
Noji Nobuharu
Nomura Norihiko
Sugiura Tetsuro
Ebara Corporation
Spitzer Robert H.
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