Trapping device

Details Trapping device Trapping device

1997-12-15

2000-12-12

Doerrler, William

Refrigeration

Low pressure cold trap process and apparatus

62 34, 62 93, B01D 800, F25B 2102, F25D 1706

Patent

active

061582263

ABSTRACT:
A trapping device is presented to improve production efficiency of vacuum processing devices. The trapping device comprises an exhaust path for evacuating process gas from a hermetic chamber through a vacuum pump; a regeneration path disposed adjacent to the exhaust path and comprising a regeneration means; not less than two trap sections communicable either with the exhaust path or with the regeneration path; and switching means for transposing the trap sections either to the exhaust path or to the regeneration path. A trapping operation and a regeneration operation can be performed concurrently respectively in the exhaust path and the regeneration path.

REFERENCES:
patent: 3719052 (1973-03-01), White
patent: 4551197 (1985-11-01), Guilmette et al.
patent: 5010737 (1991-04-01), Okumura et al.
patent: 5687575 (1997-11-01), Keville

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