Chemical apparatus and process disinfecting – deodorizing – preser – Chemical reactor – Waste gas purifier
Patent
1993-11-23
1995-06-06
Santiago, Amalia L.
Chemical apparatus and process disinfecting, deodorizing, preser
Chemical reactor
Waste gas purifier
55484, 55486, 55488, 96121, 422168, 422169, 422173, B01D 800
Patent
active
054220815
ABSTRACT:
A double cylinder shaped multilayer structural member comprising ring shaped thin plate small diameter discs and large diameter discs respectively layered via spacers is disposed in the enclosure vessel of a trap device for a vapor phase reaction apparatus. Gas from the intake opening section of the enclosure vessel is introduced into the outer side space of the multilayer structural member of the enclosure vessel, passes through the spaces between the large diameter discs and also passes through the spaces between the small diameter discs, then exits via the inner side space of the multilayer structural member from the outlet opening section of enclosure vessel to the system exterior. As a result of this construction, in comparison to conventional devices, the collection efficiency of reactive components can be increased, the equipment life extended, and maintenance frequency reduced, thereby providing a trap device for a vapor phase reaction apparatus capable of improving productivity.
REFERENCES:
patent: 5141714 (1992-08-01), Obuchi et al.
Hashimoto Akira
Miyagi Katsushin
Nagasaki Ichiro
Okada Yoshitaka
Yokokawa Osamu
Cuno K.K.
Santiago Amalia L.
Tokyo Electron Kabushiki Kaisha
Tokyo Electron Tohoku Kabushiki Kaisha
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