Transverse-structure electrostatic charged particle beam lens

Details Transverse-structure electrostatic charged particle beam lens Transverse-structure electrostatic charged particle beam lens

1997-08-05

1998-10-13

Nguyen, Kiet T.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

H01J 37147

Patent

active

058215433

ABSTRACT:
Electrostatic particle-beam lenses using a concentric co-planar array of independently biased rings can be advantageous for some applications. Traditional electrostatic lenses often consist of axial series of biased rings, apertures, or tubes. The science of lens design has devoted much attention to finding axial arrangements that compensate for the substantial optical aberrations of the individual elements. Thus, as with multi-element lenses for light, a multi-element charged-particle lens can have optical behavior that is far superior to that of the individual elements. Transverse multiple-concentric-ring lenses achieve high performance, while also having advantages in terms of compactness and optical versatility.

REFERENCES:
patent: 3973125 (1976-08-01), Loebe
patent: 4168434 (1979-09-01), Lischke et al.
patent: 4287419 (1981-09-01), Booth
patent: 4544847 (1985-10-01), Taylor
patent: 4963748 (1990-10-01), Szilagyi
patent: 5298757 (1994-03-01), Okayama

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