Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2008-09-09
2008-09-09
McPherson, John A. (Department: 1795)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S067000, C430S030000
Reexamination Certificate
active
11249596
ABSTRACT:
A process of manufacturing a liquid crystal display device of transverse electric-field type, wherein a halftone photomask which is used to form a photoresist pattern has a fully light-shielding area preventing UV irradiation of a portion of an active matrix substrate in which a thin-film transistor element is to be formed, so that the photoresist pattern includes a positive resist portion which has a first thickness and which is formed on the above-indicated portion of the substrate. The halftone mask further has a fully light-transmitting area which permits fully UV transmission therethrough to provide the photoresist pattern with a resist-free area which corresponds to a portion of the substrate in which a contact hole serving as a third connection portion connecting an external scanning-line driver circuit and a scanning-line terminal portion through a junction electrode is to be formed. The photoresist pattern also has a positive resist portion which is formed in the other portion of the substrate and which has a second thickness smaller than the first thickness. Also disclosed in a scan-exposing device used in the process is also disclosed.
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patent: 2001/0040648 (2001-11-01), Ono et al.
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patent: 2000-066240 (2000-03-01), None
McPherson John A.
Muramatsu & Associates
Obayashiseikou Co., Ltd.
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