Transporting tool for object to be tested, and...

Details Transporting tool for object to be tested, and... Transporting tool for object to be tested, and...

2006-09-19

2006-09-19

Underwood, Donald (Department: 3652)

Material or article handling

Apparatus for charging a load holding or supporting element...

C294S064200, C901S040000

Reexamination Certificate

active

07108471

ABSTRACT:
A transporting tool of this invention transports a cracked wafer between an unload table and a test position through fork, having a vacuum suction mechanism, and a main chuck. The transporting tool of this invention has a first groove formed in a first surface of the transporting tool, a first through hole which is formed to correspond to a first opening of the fork and is open to the first groove, a second groove formed in a second surface to correspond to an attracting groove of the main chuck, and a second through hole which allows the first groove and second groove to communicate with each other.

REFERENCES:
patent: 5046909 (1991-09-01), Murdoch
patent: 5636964 (1997-06-01), Somekh et al.
patent: 2001/0022652 (2001-09-01), van Schaik et al.
patent: 3-102849 (1991-04-01), None
patent: 7-58175 (1995-03-01), None
patent: 7-147311 (1995-06-01), None
patent: 10-261676 (1998-09-01), None
patent: 2001-118871 (2001-04-01), None
patent: WO99/39999 (1999-12-01), None

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