Transporting robot for semiconductor wafers

Details Transporting robot for semiconductor wafers Transporting robot for semiconductor wafers

1987-11-12

1990-02-27

Spar, Robert J.

Material or article handling

Vertically swinging load support

Grab

15301, 15312R, 981153, 104139, 2941191, 294902, 414741, 901 6, 901 17, 901 39, 901 49, B25J 1508

Patent

active

049041533

ABSTRACT:
There is disclosed a robot used in a clean room and adapted to transport a wafer cassette containing semiconductor wafers. The robot includes: a guide rail disposed in the clean room; a robot body slidably connected to the guide rail for movement along the guide rail; and a first drive mechanism for driving the robot body along the guide rail. The robot body includes: a clamping hand for releasably clamping the wafer cassette; an arm assembly, extending between the guide rail and the clamping hand, for controlling the position of the clamping hand; and a wrist assembly, interposed between the arm assembly and the clamping hand, for adjusting the orientation of the clamping hand. The wrist assembly includes: a wrist frame connected via a horizontal pivot to the arm assembly for upward and downward movement, the wrist frame rotatably supporting the clamping hand for turning about an axis perpendicular to the horizontal pivot; a second drive mechanism for pivoting the wrist frame relative to the arm assembly; and a third drive mechanism for turning the clamping hand relative to the wrist frame.

REFERENCES:
patent: 1049150 (1912-12-01), Robail
patent: 2735713 (1956-02-01), Blakeley
patent: 3968885 (1976-07-01), Hassan et al.
patent: 4336926 (1982-06-01), Inagaki et al.
patent: 4353537 (1982-10-01), Koufos
patent: 4502830 (1985-03-01), Inaba et al.
patent: 4507046 (1985-03-01), Sugimoto et al.
patent: 4591199 (1986-05-01), Zajac
patent: 4660464 (1987-04-01), Tanaka
patent: 4723799 (1988-02-01), Wollman et al.
Reduction of Labor and Automation, Jun., 1985, pp. 43-47.

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