Transporting apparatus for semiconductor device

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

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Details

324760, 324765, 4147965, G01R 104, G01R 3102, G01R 3126, B65G 5902

Patent

active

061631450

ABSTRACT:
A transporting apparatus used in testing a plurality of semiconductor devices includes a magazine in which a plurality of pallets are stacked in plural stages, each pallet with a plurality of semiconductor device placed thereon; a distributing stocker mechanism for placing the plurality of pallets in the magazine onto a carrier; a carrier transporting mechanism for transporting the carrier into a test station in a constant temperature room and transporting the carrier after to outside the constant temperature room; and a recovery stocker mechanism for recovering the plurality of pallets after test on the carrier into the magazine. Thus, the transporting apparatus with high installing area efficiency and high test efficiency can be fabricated at low production cost.

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