Transportation system and transportation method

Details Transportation system and transportation method Transportation system and transportation method

2007-04-09

2010-10-05

Hess, Douglas A (Department: 3651)

Material or article handling

Process

Of charging or discharging plural static structures for...

C414S416050, C414S416110, C414S937000

Reexamination Certificate

active

07806648

ABSTRACT:
A conveyor4for transporting a reticle cassette18is provided. A lifter16of a rail vehicle14lifts the reticle cassette18for transferring the reticle cassette18between the inside of a dummy FOUP22and the conveyor4.

REFERENCES:
patent: 5855465 (1999-01-01), Boitnott et al.
patent: 5976199 (1999-11-01), Wu et al.
patent: 6568896 (2003-05-01), Franklin et al.
patent: 6758647 (2004-07-01), Kaji et al.
patent: 6848882 (2005-02-01), Chen et al.
patent: 6979168 (2005-12-01), Uchimaki et al.
patent: 64-067932 (1989-03-01), None
patent: 6-37227 (1994-05-01), None
patent: 2000-091401 (2000-03-01), None
patent: 2002-362737 (2002-12-01), None
patent: 2003-110000 (2003-04-01), None
patent: 2005-136294 (2005-05-01), None
European Search Report dated Aug. 13, 2007, issued in corresponding European patent application No. 07007643.5.

Affiliated with

Also associated with

Rating

Transportation system and transportation method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Transportation system and transportation method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Transportation system and transportation method will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4186219