Transportable image emission microscope

Details Transportable image emission microscope Transportable image emission microscope

1993-12-27

1995-12-12

Wieder, Kenneth A.

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324251, 414222, 250310, 25044211, C23C 1400

Patent

active

054753163

ABSTRACT:
An emission microscope is mounted on a transportable structure for use on a test floor and encloses or garages an entire automatic test equipment head to facilitate high-speed testing. Test procedures allow development of static/fixed defects over time. A video mask can be developed based on emission sites on known good devices so that only emission from defect sites of bad devices under test are shown.

REFERENCES:
patent: 4680635 (1987-07-01), Khurawa
patent: 4722298 (1988-02-01), Rubin
patent: 4755874 (1988-07-01), Esrig
patent: 4772846 (1988-09-01), Reeps
"The Image Processing Book" John Russ pp. 278-293 1992 CRC Press.

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