Transport system with multiple-load-port stockers

Details Transport system with multiple-load-port stockers Transport system with multiple-load-port stockers

2006-02-07

2006-02-07

Paladini, Albert W. (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S228000, C700S230000

Reexamination Certificate

active

06996448

ABSTRACT:
A transport system for a fabrication system. The fabrication system contains a plurality of tools for processing articles. The transport system contains a stocker subsystem and a track subsystem. The stocker subsystem contains a stocker body for storing the articles and a plurality of load ports. The load ports are located on the stocker body, enabling the articles to be transferred between the stocker body and the track subsystem. The number of the load ports depends on properties of the tools. The track subsystem contains a delivery part and a load part, wherein the load part contains a plurality of branches corresponding to the load ports.

REFERENCES:
patent: 5980183 (1999-11-01), Fosnight
patent: 6169935 (2001-01-01), Iwasaki et al.
patent: 6580967 (2003-06-01), Jevtic et al.
patent: 6745102 (2004-06-01), Liu
patent: 6931303 (2005-08-01), Chang et al.

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