Transport system for thin film sputtering system

Railways – Traction – Transverse live roll

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Details

104 93, 1984654, 198722, 20429825, B61B 1312

Patent

active

056601140

ABSTRACT:
A transport drive system for use in a sputtering apparatus, particularly an in-line sputtering apparatus, is disclosed. The system transports a plurality of planar substrates and includes a plurality of transport beams having a C-shaped cross-section. Each transport beam has a first and second end, a first and second sides, a top surface, and a channel, disposed under the top portion, and forming a portion of the C-shaped cross-section. The transport beam includes a substrate carrier which secures the substrate or pallet at the top portion of the substrate or pallet, and which is mounted in an alignment with an off-center relationship with respect to the center of the transport beam. In addition, the system for transporting includes a plurality of drive beams. Each drive beam includes a plurality of horizontally-oriented guide wheels disposed on a top surface of the drive beam, the drive wheels engaging the channel of the transport beam. Each drive beam also includes a plurality of vertically-oriented wheel assemblies disposed in a plurality of U-shaped cavities in the drive beam. A motor is provided with each of the drive beams to drive the vertically-oriented wheel assemblies. A shield, provided below the drive beam, ensures that contamination does not reach the interior of the sputtering chamber.

REFERENCES:
patent: 3610393 (1971-10-01), Richardson et al.
patent: 4274936 (1981-06-01), Love
patent: 4368037 (1983-01-01), Limque et al.
patent: 4765273 (1988-08-01), Anderle
patent: 5351808 (1994-10-01), Sundseth

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