Transport speed monitoring apparatus and semiconductor...

Details Transport speed monitoring apparatus and semiconductor... Transport speed monitoring apparatus and semiconductor...

2007-03-27

2007-03-27

Kebede, Brook (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

For high frequency device

C414S935000

Reexamination Certificate

active

10838424

ABSTRACT:
A semiconductor processing system utilizing transport speed monitoring of a wafer boat. The semiconductor processing comprises a process chamber, loading device, and transport speed monitoring device. The loading device transports a boat of wafers into and out of the process chamber where the wafers experience particular treatment. The transport speed monitoring device is responsible for detecting the movement of the wafer boat and asserting an abnormality signal when the transport speed of the wafer boat falls beyond a limit.

REFERENCES:
patent: 4624638 (1986-11-01), Sarkozy
patent: 4721424 (1988-01-01), Aldridge et al.
patent: 6537010 (2003-03-01), Martin et al.
patent: 6927181 (2005-08-01), Wakizako et al.
patent: 6938505 (2005-09-01), Chen et al.
patent: 2004/0062633 (2004-04-01), Rice et al.

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