Transport module

Details Transport module Transport module

1997-07-11

2000-01-04

Foster, Jim

Special receptacle or package

Holder for a removable electrical component

For a semiconductor wafer

206454, B65D 8590

Patent

active

060100087

ABSTRACT:
A module with an openable and closeable door has a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the module for supporting wafers. An advantage and feature of the invention is that a non-interrupted path-to-ground extends from each wafer support shelf to the machine interface. Additionally, the side walls of the shell have a recess portion with engagement members that cooperate with engagement members on removable handles. The handles utilize detents to rotatably lock such handles into place on the side walls of the carrier.

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