Transport mechanism

Details Transport mechanism Transport mechanism

1986-05-14

1988-06-07

Spar, Robert J.

Material or article handling

Horizontally swinging load support

Swinging about pivot

414752, 414917, 74 98, 74103, 74469, 901 25, B25T 906

Patent

active

047493305

ABSTRACT:
A transport mechanism for silicon wafers comprises an elongate four arm linkage and a wafer support arm which is secured to the linkage through a gearing system. One of the short arms of the linkage is fixed, and as the linkage is rotated, the gearing system produces a different motion in the support arm. Preferably pinion gears are secured to the ends of the long arms and engage a pinion gear secured to one end of the support arm, so as to produce linear motion of a wafer placed on the support arm.

REFERENCES:
patent: 3750490 (1973-08-01), Fisher
patent: 4299533 (1981-11-01), Ohnaka
patent: 4584045 (1986-04-01), Richards

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