Data processing: generic control systems or specific application – Specific application – apparatus or process – Article handling
Reexamination Certificate
2006-12-19
2006-12-19
Tran, Khoi H. (Department: 3651)
Data processing: generic control systems or specific application
Specific application, apparatus or process
Article handling
C700S215000, C700S225000
Reexamination Certificate
active
07151980
ABSTRACT:
A system and method for carrier transport traffic management. A host computer connects to a fabrication tool, configured to acquire an available number of a resource type for the fabrication tool upon detecting a fabrication tool loadport of the fabrication tool is available. A material transport system connects to the host computer, receives the available number of a resource type for the fabrication tool, acquires a carrier identity corresponding to a carrier, acquires a required number of the resource type corresponding to the carrier, and issues a load command to an automated material handling system (AMHS) to transport the carrier to the fabrication tool if the available number of the resource type exceeds or equals to the required number of the resource type.
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Jang Shen-Jr
Sun King-Chuan
You James
Taiwan Semiconductor Manufacturing Co. Ltd.
Thomas Kayden Horstemeyer & Risley
Tran Khoi H.
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