Transport device, in particular for use in a vacuum chamber

Details Transport device, in particular for use in a vacuum chamber Transport device, in particular for use in a vacuum chamber

2006-04-26

2009-02-17

Bidwell, James R (Department: 3651)

Conveyors: power-driven

Conveyor section

Endless conveyor

C198S837000, C198S841000, C414S217000

Reexamination Certificate

active

07490714

ABSTRACT:
A transport device is particularly suitable for use in a vacuum chamber for the transportation of a flat substrate through the vacuum chamber and comprises a belt conveyor with at least one flexible infinite belt guided around at least two deflection rollers, whereby at least one deflection roller can be driven, and further including a filling element positioned for filling at least the space contained by the infinite belt or belts. The air volume enclosed by the transport device is significantly reduced in comparison to conventional solutions by incorporating the filling element in the transport element. As a result, the volume to be evacuated from the vacuum chamber is reduced. The vacuum chamber can be evacuated and ventilated more rapidly. Nevertheless, the transport device is constructed so as to be maintenance-friendly. Maintenance work can be carried out easily, because the infinite belts and the deflection rollers are easily accessible. The transport device can also easily be upgraded in the case of existing vacuum chambers.

REFERENCES:
patent: 4457419 (1984-07-01), Ogami et al.
patent: 4591044 (1986-05-01), Ogami et al.
patent: 4804081 (1989-02-01), Lenhardt
patent: 5878868 (1999-03-01), Gotoh et al.
patent: 6164432 (2000-12-01), Monsees
patent: 197 14 271 (1998-10-01), None

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