Transport device for workpieces in a vacuum system

Details Transport device for workpieces in a vacuum system Transport device for workpieces in a vacuum system

1997-09-26

1999-06-08

Keenan, James W.

Material or article handling

Apparatus for moving material between zones having different...

For carrying standarized mechanical interface type

414939, 1988361, B65G 4907

Patent

active

059099950

ABSTRACT:
A device for transporting substrates through a vacuum system has a flat, parallel piped, plate-shaped substrate holder with upper and lower holder areas that are moveable in a vertical position along a transport path through the system. The upper part of the substrate holder is supported without contact and is movably guided by a magnetic arrangement.

REFERENCES:
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patent: 4892451 (1990-01-01), Mahler
patent: 4918345 (1990-04-01), Vaillant De Guelis et al.
patent: 5133285 (1992-07-01), Mahler et al.
patent: 5199552 (1993-04-01), Dauchez
patent: 5387889 (1995-02-01), Maeda et al.
patent: 5469958 (1995-11-01), Gruettner et al.

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