Transparent optical chuck incorporating optical monitoring

Details Transparent optical chuck incorporating optical monitoring Transparent optical chuck incorporating optical monitoring

1994-09-13

1996-05-07

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356360, G01B 902

Patent

active

055151671

ABSTRACT:
A transparent chuck is used to force a semiconductor wafer to take a prescribed shape. Any gap which is formed between the chuck and the wafer can be imaged through the transparent chuck. An interferometer is used to illuminate the gap with a narrow band illumination to create interference fringes in the gap. The fringes can be electronically imaged to create a digital input to a computer. Merit functions corresponding to the total volume of fringes in the gap or to the summation of nearest neighbor slopes of such fringes provide a measure of the thickness of such gap.

REFERENCES:
patent: 4932781 (1990-06-01), Kuwayama
patent: 5363171 (1994-11-01), Mack

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