Transparent fused silica bell for purposes relating to semicondu

Details Transparent fused silica bell for purposes relating to semicondu Transparent fused silica bell for purposes relating to semicondu

1982-02-04

1985-07-23

Bernstein, Hiram H.

Chemical apparatus and process disinfecting, deodorizing, preser

Chemical reactor

Including specific material of construction

422245, 118715, C30B 2508

Patent

active

045308187

ABSTRACT:
An epitaxy bell of transparent fused silica is provided with a flanged, thick-walled tubular piece of transparent fused silica on the side on which a process gas is exhausted. The wall thickness of the constricted portion of the bell is increased toward the transparent fused silica tubular piece.

REFERENCES:
patent: 3751539 (1973-08-01), Reuschel et al.
patent: 3853974 (1974-12-01), Reuschel et al.
patent: 4000716 (1977-01-01), Kurata et al.
patent: 4019645 (1977-04-01), Seiler et al.
patent: 4173944 (1979-11-01), Koppl et al.

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