Stock material or miscellaneous articles – Composite – Of quartz or glass
Reexamination Certificate
2011-08-09
2011-08-09
Blackwell, Gwendolyn (Department: 1784)
Stock material or miscellaneous articles
Composite
Of quartz or glass
C428S428000, C428S699000, C428S701000, C428S702000
Reexamination Certificate
active
07993752
ABSTRACT:
The photovoltaic structure comprises a thin film coating on a transparent substrate, the thin film comprising an effective amount of nanocrystalline silicon embedded in a matrix of amorphous and/or microcrystalline silicon. A transparent conducting oxide layer on a layer of non-conductive transparent oxide provides light-trapping capability as well as electrical conductivity where needed. A chemical vapor deposition (“CVD”) reactor provides improved gas distribution to the substrates being coated in the reactor. An improved sputtering process and an improved RF plasma-enhanced CVD manufacturing method both using high levels of hydrogen in the hydrogen-silane mixture and high electrical power levels for the plasma to increase the speed and to lower the cost of manufacturing.
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Blackwell Gwendolyn
Nano PV Technologies, Inc.
Neff, Esq. Gregory N.
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