Transparent conductive films and methods of producing same

Details Transparent conductive films and methods of producing same Transparent conductive films and methods of producing same

1978-08-23

1982-09-14

Gantz, Delbert E.

Chemistry: electrical and wave energy

Processes and products

Vacuum arc discharge coating

C23C 1500

Patent

active

043494250

ABSTRACT:
Cadmium-tin oxide films are prepared by d-c reactive sputtering of Cd-Sn alloys in Ar-O.sub.2 mixtures. The films obtained have low resistivity of the order of 10.sup.-3 -10.sup.-4 .OMEGA.-cm and high optical transparency depending upon deposition conditions.

REFERENCES:
patent: 3811953 (1974-05-01), Nozik
patent: 4006070 (1977-02-01), King et al.
patent: 4040927 (1977-08-01), Chaffin et al.
patent: 4048372 (1977-09-01), Ando et al.
patent: 4065600 (1977-12-01), King et al.
G. Haacke, "New Figure of Merit for Transparent Conductors", Journal of Applied Physics, vol. 47, No. 9, Sep. 1976, pp. 4086-4089.
G. Haacke et al., "Sputter Deposition and Characterization of Cd.sub.2 SnO.sub.4 Films", Thin Solid Films, 55, (1978), pp. 67-81.
D. B. Fraser et al., "Highly Conductive, Transparent Films . . . ", J. Electrochemical Society, vol. 119, No. 10, Oct. 1972, pp. 1368-1374.

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