Transparent conductive films and methods of producing same

Details Transparent conductive films and methods of producing same Transparent conductive films and methods of producing same

1982-04-16

1983-12-27

Albritton, C. L.

Electrical resistors

Resistance value responsive to a condition

Photoconductive

204192P, H01L 3108

Patent

active

044234031

ABSTRACT:
Cadmium-tin oxide films are prepared by d-c reactive sputtering of Cd-Sn alloys in Ar-O.sub.2 mixtures. The films obtained have low resistivity of the order of 10.sup.-3 -10.sup.-4 .OMEGA.-cm and high optical transparency depending upon deposition conditions.

REFERENCES:
patent: 3811953 (1974-05-01), Nozik

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