Transparent carbon nitride films and compositions of matter comp

Details Transparent carbon nitride films and compositions of matter comp Transparent carbon nitride films and compositions of matter comp

1994-10-25

1996-11-12

Turner, Archene

Stock material or miscellaneous articles

Composite

Of inorganic material

428336, 423414, 423364, B32B 900

Patent

active

055738648

ABSTRACT:
The present invention provides transparent carbon nitride films, processes or making them and compositions of matter comprising them. The films are made using a magnetron sputter gun and a ion beam. Low pressure and high velocity atoms and ions are an important part of the present invention.

REFERENCES:
patent: 4003764 (1977-01-01), Wunning
patent: 4664976 (1987-05-01), Kimuru et al.
patent: 5110679 (1992-05-01), Haller et al.
patent: 5405515 (1995-04-01), Fang

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